Development and Testing of New Micromachines

Development and Testing of New Micromachines AN UNDERGRADUATE THESIS PROPOSAL SUBMITTED IN PARTIAL FULFILLMENT OF THE REQUIREMENTS FOR ENSC 498 By: Steven Wen-Ting Liao (#12345-6789) Version: 1.1 Date: April 7, 2002 academician & Technical executive prodeoxyguanosine monophosphate: Dr. Ash Parameswaran committal Member: Dr. Marek Syrzycki Committee Member: Mr. commove Woods E-Mail: anonymous@sfu.ca SIMON FRASER UNIVERSITY SCHOOL OF engine room SCIENCE UNDERGRADUATE THESIS PROPOSAL Name: Steven Wen-Ting Liao Student #: 12345-6789 Option: Electronics theatre of Research: Micro-Electro-Mechanical Systems (MEMS) PROPOSED SUPERVISORY citizens committee: Technical and Academic Supervisor: Dr. Ash Parameswaran Committee Member: Dr. Marek Syrzycki Committee Member: Mr. Bill Woods TITLE OF PROJECT: Development and Testing of New Micromachines expert AND ACADEMIC SUPERVISOR: Dr. Ash Parameswaran Date Submitted: Comments: APPROVED: contact Date COMMITTEE MEMBER: Dr. Marek Syrzycki Date Submitted: Comments: APPROVED: mite Date COMMITTEE MEMBER: Mr.

Bill Woods Date Submitted: Comments: APPROVED: Signature Date ii Abstract Micro-Electro-Mechanical-Systems (MEMS), or more simply, micromachines, are believed by many people to be the next logical step in the silicon revolution. This comparatively new technology exploits the existing microelectronics infrastructure to create complex automatonlike devices with sizes of a few microns. These micromachines can provide functions such as sensing, commu- nication, and actuation. Furthermore, extensive applications for micromachines can be found in both mercantile and defence systems. For several years, ENSC 494, a special topics course, has been offered to teach students about the design, fabrication, and examination of micromachines using MUMPs technology offered by TM CRONOS. The Multi-User MEMS Processes, or MUMPs, is a well-established commercial pro- gram that provides the international industrial, governmental,... If you want to get a full essay, lay it on our website: Orderessay

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